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Author :
Hwek-Yung Kim
1 Articles
28
Change of Refractive Index and Residual Stresses of Ta
2
O
5
Thin Film Prepared by Dual Ion Beam Sputtering Deposition as the Substrate Temperature and Assist ion Beam Energy
Seok-Gyu Yeon, Yong-Tak Kim, Hwek-Yung Kim, Myoung-Jin Kim, Hyung-Man Lee, Dae-Ho Yoon
J. Korean Ceram. Soc.
2005;42(1):28
DOI:
https://doi.org/10.4191/kcers.2005.42.1.028
Cited By 1
Materials Science, Ceramics - Q1
Journal Impact Factor 2.5